Product Introduction

It adopts marble base, high-precision linear guide rail and glass working table to ensure high precision, high stability and high cost performance. Line spectral sensor can be selected according to the actual measurement accuracy and field of view requirements, combined with powerful composite measurement software to complete the 3D plane size measurement. It is widely used in mobile phone industry, semiconductor, battery, medical products and other industries.

Product Features

1.3D in the Z direction of the detection accuracy of up to 0.05um;
2. The optical system mainly adopts LMI line spectroscopy;
3. Measurement items mainly include outer contour, slot depth, gap, bumps, pits and other micro-nano-pole 3D size measurement;
4. High-precision marble motion platform, with high-precision scale, repeatable positioning accuracy up to 2.5um;
5. Powerful multi-sensor composite measurement software with 2D/3D measurement, contour scanning, CAD comparison, offline programming and other functions;
6. Rich SPC statistical analysis tools, which can automatically generate mean and extreme deviation graphs, normal distribution graphs, and Cpk, GRR and other reports.